Horizontally Oriented Long Carbon Nanotubes for Nanoelectronic Applications

Technology Overview

This technology is a catalytic chemical vapor deposition method for synthesizing long carbon nanotubes. An oxidized silicon surface is coated with a catalytically active film consisting of iron and molybdenum material. This coated substrate is placed in a furnace and is brought to the reaction temperature by radio frequency heating. A carbon-rich gas such as acetylene is then passed over the hot, coated substrate, and very long (hundreds of microns in length) carbon nanotubes are formed on the surface.


• Large aspect ratio: the nanotubes that are formed have large length-to-diameter ratios
• Multiple forms: single wall, double wall, and multiple wall carbon nanotubes can be formed


• Nanoelectronic devices
• Field effect transistors
• Nanocomposites

For additional information on the patent application, please follow this link:
Patent Information Application


Keywords: single walled carbon nanotube, cvd, catalyst, catalytic chemical vapor deposition, silicon, silica, iron, molybdenum, alumina, acetylene, radio frequency, RF, susceptor, double-walled carbon nanotube, multi-walled carbon nanotube, percolation, conductivity, nano-electronics
Inventors: Alexandru S. Biris, Enkeleda Dervishi, Zhongrui Li, Yang Xu